In this position: http://eidogo.com/#2Ctomyl2:0,52

White has just invaded an area where there were formerly just Black stones.

So, the question becomes: how does Black punish White for this move.

As you can see (http://eidogo.com/#2Ctomyl2:0,53) I played O5 to separate the single stone from the floating White group on the right side.

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I wouldn't call that an invasion. Looks more like some combination of mojo building and reduction to me. And why do you think there is a punishment?

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Agree, if anything that's a reduction, not an invasion.

Also, it looks like a great move to me, so I wouldn't recommend you attempt to punish it.

If you can't come up with a clear punishment, it's best to assume it's a reasonable move and proceed accordingly. The strategy of assuming it's wrong and trying to punish it usually doesn't turn out well.

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On short analysis, black seems pretty much behind so this looks good. But I would be very concerned about future of B's 2 lower side stones... Maybe try to make shape there somehow..

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